Due to their high degree of integration, miniaturization and automation, lab-on-a-chip (LOC) systems enable the realization of complex processes with minimal technical and personnel effort. They are characterized by low investment and operating costs, a very compact design and simple handling. This allows mobile use on site. The potential of LOC systems is growing in many areas of biotechnology and medical technology such as point-of-care diagnostics /pandemic control, drug discovery and development, individual medicine and animal-free substance testing. The project goal is the development of a process chain so that filigree semiconductor sensor technology can be integrated directly,bio compatible and fluidically tight into LOC systems.